High Performance Materials

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FD-400 & FD-200 Programmable Air-Gas Sampling System

Fred Pourmirzaie -Business Manager

fpour@flodynamix.com Dr. Mo Toofan -Technical Advisor mtoof@flodynamix.com

Gas:

A state of matter in which the molecules are free to move in any direction and expand to fill a container in which they are held.

Aerosol:

Microscopic liquid particles suspended in gas.

Airborne Particulates:

Microscopic pieces of solid suspended in air.

  1. Capable of air sampling in four different positions simultaneously and independently.

  2. Universal air sampler, capable of air sampling for different samples; Organic, Inorganic, & Particle.

  3. Precisely can provide samples in closed systems with >98% yield.

  4. Provides air samples, fast and accrue any time in absence of any operator.

After Sample Taking

Before Sample Taking

Before Sample Taking After Sample Taking

  1. Ambient air analysis for negative, neutral, positive inorganic ions, and organic contaminants in the environment (COx, NOx, SOx, POx, NHx, R-COO, R-NHx, R-OH, R-CO-R and etc.)

  2. Continuous emissions monitoring for acid gasses and ammonia from industrial stacks.

  3. Air sampling in electronics manufacturing clean rooms & monitoring clean room filters efficiency.

    1. Ambient air analysis in chemical manufacturing for industrial hygiene.

      1. Achieving quantitative extraction: a-Organic by TDT, PB b-Inorganic by bubbler, impinger, denuder c-Particles by impinger and filtration d-Bacteria, fungus by filtration, bubbler

      2. Minimizing the sample contamination.

      3. Provide a highly concentrated samples for low ppb contamination detection.

      4. No preparation on the collected samples.

Table 1: Anions Sampling (without use of concentrator)

Analyte DL (ng/L air)
Cl -0.2
F -3.0
NOX -1
POX 3 3
SOX 2
RCOO -3

Table 2: Cations Sampling for IC and ICP/MS analysis

Analyte DL (ng/L air)
Na + 1
K + 1
Ca 2+ 2
NH4 + 1
Ni 2+ 2
Cr 3+ 2

1.Direct:

a-Chemical Sources b-Consumable c-DI-Water

2.Indirect: a-Physical Sources b-Chemical Sources

SO2 (Gas Phase) SO2 (Dissolved in H2O) Slow Step SO2 (Dissolved in H2O) + H2O H2SO3 2H2O2 2H2O + O2

1 Fast Step

H2SO3 + 2 O2 H2SO4

SO2 Flow Rate (mL/Min) N2 Gas as a Dilution Gas (mL/Min) Average Peak area (10 –5 )
84 0 172 + 3.4*
84 1,000 169 + 3.2 *
84 1,500 167 + 3.3 *
84 2,000 160 + 3.0 *

* 35 injections/ run

Sulfate peak Area ( X 10 -5)

2000 1500 1000

Sulfur Dioxide Flow rate (mL/min)

SO2 Flow Rate [ mL/min ] Sulfate Peak Area ( X 10 5 ) [ 0 mL/min N2 gas ] Sulfate Peak Area ( X 10 5 ) [ 1000 mL/min N2 gas ]
0 0 0
92 254 250
165 430 425
341 869 900
510 1365 1360
683 1950 1965
SO2, Flow Rate (mL/min) Recovery (%)
80 99
163 97
305 99
445 98
680 97
778 99
890 98

[SO2] = 9.9 nL/L

Hydrogen Peroxide (mM) Sulfate Peak Area ( X 10 5 )
0.00 250
0.27 435
0.54 450
0.80 450
1.10 449
1.42 450
1.76 452
2.85 450

0.00

1.00 2.00 3.00 4.00 Hydrogen Peroxide Concentration (mM)

High Performance Materials

Recovery of Sulfur Dioxide By Air Sampler in 0.54 mM Hydrogen Peroxide

9999 99 98 98

97 97

0 200 400 600 800 1000 SO2 Flow Rate (mL/min)

1155 Park Avenue, Emeryville, CA 94608 • (888) 99 NuGen • (707) 820 4080 Fax (707) 820 4079 www.nugentec.com info@nugentec.com

% Recovery (SulfateIon)

NH3Flow Rate
[ mL/min ] % Recovery
36 99
136 98
200 96
442 98
650 97
820 99
968 99

Concentration of NH3 = 11nL/L

The following chemicals are made for each interested gas recovery:

SO3 Isopropyl Alcohol SO2 Hydrogen Peroxide HCl Diluted sodium Hydroxide NH3 Diluted Hydrochloric acid NO2 Triethanolamine

PK # RT Detected Compounds PPB Possibility
1 3.79 2-Propenoic Acid, 2-Methyle 0.27 P
2 6.26 2H-Azepin-2-one, Hexahedron 0.12 A
3 6.46 1-Amino-2, 2-dimethyle-norbornane 0.88 A
4 7.06 Benzene, 2, 3-Di-Isocyaanato-1-methyl 0.38 H
5 7.25 1, 5-Heptadiene, 2-Methyl 0.99 H
6 7.31 2-Propanamine, 2-Metthyl 0.12 A
7 9.9 Furan, 2, 5-Diethyltetrahydro 0.73 H
8 11.19 2-Propanic Acid, 2-Methyl 0.22 P
9 11.83 Poperidine, 1-Nitroso 1.1 A
10 12.93 2-Proponic Acid, 2-Methyl-1,2 Ethyl 0.19 P
11 14.49 2-Proponic Acid, 2-Methyl, 1, 2 Ethane 0.15 P
12 16.03 Proponic Acid, 2-Hydroxy-2-Methyl 0.1 P
Total Items PPB Total %
Plasticizer 0.93 17.70
Adhesive 2.22 42.30
Hydrocarbons 2.1 40.00

Total Organic Contamination 5.25

4079

1. Hard Disk Manufacturing No.1 (Class 100 Clean room) Suspected NO2 gas contamination was causing low yield
2. Hard Disk Manufacturing No. 2 (Class 100 Clean room) Random periods of low yield
3. Semiconductor Manufacturing No.1 (Class 10 and 100 Clean rooms) Low yields, plans for higher resolution chips
4. Semiconductor Manufacturing No. 2 (Class 10 and 100 Clean rooms) High resolution chips. General interest in preventive measures to ensure good yield

PEAK AREA (X10-5)

WEEKS

WEEKS

Location Low Ammonia Conc. (nL/L) High Ammonia Conc. (nL/L) Avg. Ammonia Conc. (nL/L)
Load 14.0 40.0 29.0
Texture 8.1 9.0 9.0
Wash # 1 148.0 212.0 183.0
Sputtering 0.6 0.7 0.6
Wash # 2 5.1 5.5 5.5
QC 3.4 3.8 3.8
Location Sodium (ng/L) Ammonia (ng/L) Potassium (ng/L Chloride (ng/L)
Plating <0.2 1.0 <0.03 <1.0
Sputtering 11.0 0.7 0.5 3.0
Photoresist 6.6 1.0 0.3 2.8
Plasma Etch 1.5 2.1 <0.03 0.7
Analyte (nL/L) Class 100 production Clean room Ammonia (ng/L) Potassium (ng/L Chloride (ng/L)
Fluoride as HF H 0.5 L 0.2 Avg. 3.5 1.0 <0.03 <1.0
Formic Acid H 3.2 L 1.1 Avg. 1.4 0.7 0.5 3.0
NO2 H 3.3 L 1.3 Avg. 1.8 1.0 0.3 2.8
Ammonia H 23 L 1.3 Avg. 1.8 2.1 <0.03 0.7
  1. Monitoring clean rooms’ air quality is the most important event in fabrication of high density devices.

  2. Monitoring of the clean room environmental air filters & their performances will reduce cost of ownership.

  3. Ion Chromatography, ICP/MS and EDX are the best analytical tools for detection of the inorganic ions.

  4. GC/MS, FTIR, XPS are the most important tools for detection of airborne contaminants.

  5. Liquid particle counts and sizing, and EDX are the most important analytical tools for particle counts & particle characterization.

Your thoughts on the cost of not having an air sampler!!!

Thank You For Your Attention